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Conference Presentation PreJuSER-39866
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Patterning of sub 50nm structures for diffusion investigations in vertical double-gate MOSFETs

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2004

Frühjahrstagung der Deutschen Physikalischen Gesellschaft
Seminar, RegensburgRegensburg, 8 Mar 20042004-03-08


Note: Record converted from VDB: 12.11.2012
Contributing Institute(s):
  1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
Research Program(s):
  1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2004
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Document types > Presentations > Conference Presentations
Institute Collections > PGI > PGI-9
Workflow collections > Public records
Publications database
 Record created 2012-11-13, last modified 2018-02-10
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