Poster

PreJuSER-47814

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Defect and contact properties - their influence on shape and magnitude of I(V)-leakage current curves in high-permittivity thin film capacitors

Schroeder, H.FZJ*

2005

Note: Record converted from VDB: 12.11.2012

---

Contributing Institute(s):

1. Elektronische Materialien (IFF-IEM)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2005

---