%0 Conference Paper
%A Hennessy, Michael
%A Moynihan, Eoin
%A O'Connell, Eoghan
%A Rost, Stefan
%A Auge, Manuel
%A Bui, Minh
%A Kardynal, Beata
%A Hofsäss, Hans
%A Bangert, Ursel
%T Atomic Resolution Investigation of Ultra-Low Energy Ion-Implanted Monolayer TMDs Using Scanning Transmission Electron Microscopy
%J Microscopy and microanalysis
%V 28
%N S1
%@ 1079-8501
%C New York, NY
%I Cambridge University Press
%M FZJ-2023-01359
%P 2538 - 2540
%D 2022
%B Microscopy and Microanalysis 2022
%C 31 Jul 2022 - 4 Aug 2022, Oregon (USA)
Y2 31 Jul 2022 - 4 Aug 2022
M2 Oregon, USA
%F PUB:(DE-HGF)16 ; PUB:(DE-HGF)8
%9 Journal ArticleContribution to a conference proceedings
%R 10.1017/S1431927622009692
%U https://juser.fz-juelich.de/record/1005171