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@INPROCEEDINGS{Hennessy:1005171,
      author       = {Hennessy, Michael and Moynihan, Eoin and O'Connell, Eoghan
                      and Rost, Stefan and Auge, Manuel and Bui, Minh and
                      Kardynal, Beata and Hofsäss, Hans and Bangert, Ursel},
      title        = {{A}tomic {R}esolution {I}nvestigation of {U}ltra-{L}ow
                      {E}nergy {I}on-{I}mplanted {M}onolayer {TMD}s {U}sing
                      {S}canning {T}ransmission {E}lectron {M}icroscopy},
      journal      = {Microscopy and microanalysis},
      volume       = {28},
      number       = {S1},
      issn         = {1079-8501},
      address      = {New York, NY},
      publisher    = {Cambridge University Press},
      reportid     = {FZJ-2023-01359},
      pages        = {2538 - 2540},
      year         = {2022},
      month         = {Jul},
      date          = {2022-07-31},
      organization  = {Microscopy and Microanalysis 2022,
                       Oregon (USA), 31 Jul 2022 - 4 Aug 2022},
      cin          = {PGI-9 / PGI-1},
      ddc          = {500},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)PGI-1-20110106},
      pnm          = {5224 - Quantum Networking (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5224},
      typ          = {PUB:(DE-HGF)16 / PUB:(DE-HGF)8},
      doi          = {10.1017/S1431927622009692},
      url          = {https://juser.fz-juelich.de/record/1005171},
}