%0 Journal Article
%A Beyer, Wolfhard
%A Nuys, Maurice
%A Andrä, Gudrun
%A Bosan, Hassan Ali
%A Breuer, Uwe
%A Finger, Friedhelm
%A Gawlik, Annett
%A Haas, Stefan
%A Lambertz, Andreas
%A Nickel, Norbert
%A Plentz, Jonathan
%T Secondary Ion Mass Spectrometry Study of Hydrogenated Amorphous Silicon Layer Disintegration upon Rapid (Laser) Annealing
%J Physica status solidi / A
%V 220
%N 12
%@ 1862-6300
%C Weinheim
%I Wiley-VCH
%M FZJ-2023-01669
%P pssa.202200671
%D 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000984532700001
%R 10.1002/pssa.202200671
%U https://juser.fz-juelich.de/record/1006434