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@ARTICLE{Beyer:1006434,
      author       = {Beyer, Wolfhard and Nuys, Maurice and Andrä, Gudrun and
                      Bosan, Hassan Ali and Breuer, Uwe and Finger, Friedhelm and
                      Gawlik, Annett and Haas, Stefan and Lambertz, Andreas and
                      Nickel, Norbert and Plentz, Jonathan},
      title        = {{S}econdary {I}on {M}ass {S}pectrometry {S}tudy of
                      {H}ydrogenated {A}morphous {S}ilicon {L}ayer
                      {D}isintegration upon {R}apid ({L}aser) {A}nnealing},
      journal      = {Physica status solidi / A},
      volume       = {220},
      number       = {12},
      issn         = {1862-6300},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2023-01669},
      pages        = {pssa.202200671},
      year         = {2023},
      cin          = {IEK-5},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-5-20101013},
      pnm          = {1213 - Cell Design and Development (POF4-121)},
      pid          = {G:(DE-HGF)POF4-1213},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000984532700001},
      doi          = {10.1002/pssa.202200671},
      url          = {https://juser.fz-juelich.de/record/1006434},
}