TY  - JOUR
AU  - Landers, David
AU  - Clancy, Ian
AU  - Dunin-Borkowski, Rafal E.
AU  - Weber, Dieter
AU  - Stewart, Andrew A.
TI  - TEMGYM Advanced – NanoMi lens characterisation
JO  - Micron
VL  - 169
SN  - 0047-7206
CY  - New York, NY [u.a.]
PB  - Elsevier
M1  - FZJ-2023-02328
SP  - 103450 -
PY  - 2023
AB  - A complete analysis including finite element method (FEM) calculation, focal length properties, and thirdorder geometric aberrations of the open-source electrostatic lens from the NanoMi project is presented. The analysis is carried out by the software TEMGYM Advanced, a free package developed to carry out ray-tracing and lens characterisation in Python. Previously TEMGYM Advanced has shown how to analyse the aberrations of analytical lens fields; this paper expands upon this work to demonstrate how to apply a suitable fitting method to discrete lens fields obtained via FEM methods so that the aberrations of real lens designs can be calculated. Each software platform used in this paper is freely available in the community and creates a free and viable alternative to commercial lens design packages.
LB  - PUB:(DE-HGF)16
C6  - 37030084
UR  - <Go to ISI:>//WOS:000976676000001
DO  - DOI:10.1016/j.micron.2023.103450
UR  - https://juser.fz-juelich.de/record/1008402
ER  -