%0 Thesis
%A Klos, Jan
%T Technological improvements of silicon based quantum devices for a scalable qubit architecture
%I RWTH Aachen
%V Dissertation
%M FZJ-2023-04588
%P 275 p
%D 2023
%Z Dissertation, RWTH Aachen, 2023
%F PUB:(DE-HGF)11
%9 Dissertation / PhD Thesis
%U https://juser.fz-juelich.de/record/1018144