TY  - THES
AU  - Klos, Jan
TI  - Technological improvements of silicon based quantum devices for a scalable qubit architecture
PB  - RWTH Aachen
VL  - Dissertation
M1  - FZJ-2023-04588
SP  - 275 p
PY  - 2023
N1  - Dissertation, RWTH Aachen, 2023
LB  - PUB:(DE-HGF)11
UR  - https://juser.fz-juelich.de/record/1018144
ER  -