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@PHDTHESIS{Klos:1018144,
      author       = {Klos, Jan},
      title        = {{T}echnological improvements of silicon based quantum
                      devices for a scalable qubit architecture},
      school       = {RWTH Aachen},
      type         = {Dissertation},
      publisher    = {RWTH Aachen},
      reportid     = {FZJ-2023-04588},
      pages        = {275 p},
      year         = {2023},
      note         = {Dissertation, RWTH Aachen, 2023},
      cin          = {PGI-11},
      cid          = {I:(DE-Juel1)PGI-11-20170113},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)11},
      url          = {https://juser.fz-juelich.de/record/1018144},
}