%0 Conference Paper
%A Han, Yi
%A Sun, Jingxuan
%A Radu, Ionut
%A Knoch, Joachim
%A Grützmacher, Detlev
%A Zhao, Qing-Tai
%T Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide
%M FZJ-2024-01005
%P 5.1
%D 2023
%B EUROSOI-ULIS
%C 10 Mar 2023 - 12 Mar 2023, Tarragona (Spain)
Y2 10 Mar 2023 - 12 Mar 2023
M2 Tarragona, Spain
%F PUB:(DE-HGF)8
%9 Contribution to a conference proceedings
%U https://juser.fz-juelich.de/record/1021856