001021856 001__ 1021856
001021856 005__ 20240226075409.0
001021856 037__ $$aFZJ-2024-01005
001021856 1001_ $$0P:(DE-Juel1)176845$$aHan, Yi$$b0$$eCorresponding author$$ufzj
001021856 1112_ $$aEUROSOI-ULIS$$cTarragona$$d2023-03-10 - 2023-03-12$$wSpain
001021856 245__ $$aImproved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide
001021856 260__ $$c2023
001021856 300__ $$a5.1
001021856 3367_ $$2ORCID$$aCONFERENCE_PAPER
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001021856 3367_ $$2BibTeX$$aINPROCEEDINGS
001021856 3367_ $$2DRIVER$$aconferenceObject
001021856 3367_ $$2DataCite$$aOutput Types/Conference Paper
001021856 3367_ $$0PUB:(DE-HGF)8$$2PUB:(DE-HGF)$$aContribution to a conference proceedings$$bcontrib$$mcontrib$$s1706528857_27505
001021856 536__ $$0G:(DE-HGF)POF4-5221$$a5221 - Advanced Solid-State Qubits and Qubit Systems (POF4-522)$$cPOF4-522$$fPOF IV$$x0
001021856 536__ $$0G:(GEPRIS)422581876$$aDFG project 422581876 - Kryogene CMOS Technologie für die Realisierung von von klassischen QuBit-Kontrollschaltkreisen (422581876)$$c422581876$$x1
001021856 7001_ $$0P:(DE-Juel1)186864$$aSun, Jingxuan$$b1$$ufzj
001021856 7001_ $$0P:(DE-HGF)0$$aRadu, Ionut$$b2
001021856 7001_ $$0P:(DE-HGF)0$$aKnoch, Joachim$$b3
001021856 7001_ $$0P:(DE-Juel1)125588$$aGrützmacher, Detlev$$b4$$ufzj
001021856 7001_ $$0P:(DE-Juel1)128649$$aZhao, Qing-Tai$$b5$$ufzj
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001021856 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)176845$$aForschungszentrum Jülich$$b0$$kFZJ
001021856 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)186864$$aForschungszentrum Jülich$$b1$$kFZJ
001021856 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)125588$$aForschungszentrum Jülich$$b4$$kFZJ
001021856 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)128649$$aForschungszentrum Jülich$$b5$$kFZJ
001021856 9131_ $$0G:(DE-HGF)POF4-522$$1G:(DE-HGF)POF4-520$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5221$$aDE-HGF$$bKey Technologies$$lNatural, Artificial and Cognitive Information Processing$$vQuantum Computing$$x0
001021856 9141_ $$y2023
001021856 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
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