TY  - CONF
AU  - Han, Yi
AU  - Sun, Jingxuan
AU  - Radu, Ionut
AU  - Knoch, Joachim
AU  - Grützmacher, Detlev
AU  - Zhao, Qing-Tai
TI  - Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide
M1  - FZJ-2024-01005
SP  - 5.1
PY  - 2023
T2  - EUROSOI-ULIS
CY  - 10 Mar 2023 - 12 Mar 2023, Tarragona (Spain)
Y2  - 10 Mar 2023 - 12 Mar 2023
M2  - Tarragona, Spain
LB  - PUB:(DE-HGF)8
UR  - https://juser.fz-juelich.de/record/1021856
ER  -