| Hauptseite > Publikationsdatenbank > Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide > print |
| 001 | 1021856 | ||
| 005 | 20240226075409.0 | ||
| 037 | _ | _ | |a FZJ-2024-01005 |
| 100 | 1 | _ | |a Han, Yi |0 P:(DE-Juel1)176845 |b 0 |e Corresponding author |u fzj |
| 111 | 2 | _ | |a EUROSOI-ULIS |c Tarragona |d 2023-03-10 - 2023-03-12 |w Spain |
| 245 | _ | _ | |a Improved performance of FDSOI FETs at cryogenic temperatures by optimizing ion implantation into silicide |
| 260 | _ | _ | |c 2023 |
| 300 | _ | _ | |a 5.1 |
| 336 | 7 | _ | |a CONFERENCE_PAPER |2 ORCID |
| 336 | 7 | _ | |a Conference Paper |0 33 |2 EndNote |
| 336 | 7 | _ | |a INPROCEEDINGS |2 BibTeX |
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| 536 | _ | _ | |a DFG project 422581876 - Kryogene CMOS Technologie für die Realisierung von von klassischen QuBit-Kontrollschaltkreisen (422581876) |0 G:(GEPRIS)422581876 |c 422581876 |x 1 |
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| 700 | 1 | _ | |a Knoch, Joachim |0 P:(DE-HGF)0 |b 3 |
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| 700 | 1 | _ | |a Zhao, Qing-Tai |0 P:(DE-Juel1)128649 |b 5 |u fzj |
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| 914 | 1 | _ | |y 2023 |
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