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@ARTICLE{Martnez:1023072,
author = {Martínez, Karí and Minenkov, Alexey and Aberl, Johannes
and Buca, Dan and Brehm, Moritz and Groiss, Heiko},
title = {{I}n situ {TEM} heating experiments on thin epitaxial
{G}e{S}n layers: {M}odes of phase separation},
journal = {APL materials},
volume = {11},
number = {10},
issn = {2166-532X},
address = {Melville, NY},
publisher = {AIP Publ.},
reportid = {FZJ-2024-01645},
pages = {101117},
year = {2023},
abstract = {The thermal stability of GeSn epitaxial thin films was
investigated via in situ transmission electron microscopy
(TEM). Samples were grown with a similar layer structure and
10 $at.\%$ Sn content by either molecular beam epitaxy or
chemical vapor deposition. Despite the same layer thickness
and concentration, the decomposition mode differs
dramatically for each GeSn sample during annealing
experiments. We observed that the sample with a Ge buffer on
a Ge substrate is structurally stable up to 500 °C, while
above this temperature, β-Sn precipitates appear,
indicating a decomposition mechanism of solid-state
precipitation. On the other hand, the second sample
exhibited high susceptibility to Ga ion incorporation during
the focused ion beam TEM specimen preparation, which is
attributed to a high defect density owing to an atypically
thin Ge buffer layer grown on a Si substrate. In this case,
the efficient phase separation in the sample was facilitated
by Ga contamination, promoting the appearance of a
GaSn-based liquid phase at a temperature as low as
200 °C. The decomposition temperatures found and the
occurrence of the two different decomposition modes are
discussed in relation to the experimental methods used.},
cin = {PGI-9},
ddc = {600},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {5234 - Emerging NC Architectures (POF4-523)},
pid = {G:(DE-HGF)POF4-5234},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001099555300003},
doi = {10.1063/5.0167407},
url = {https://juser.fz-juelich.de/record/1023072},
}