%0 Journal Article
%A Qiu, Depeng
%A Duan, Weiyuan
%A Lambertz, Andreas
%A Bittkau, Karsten
%A Rau, Uwe
%A Ding, Kaining
%T Synergetic Effect of Gas Compositions on Material Properties of n‐Type Nanocrystalline Silicon Oxide Prepared by Plasma‐Enhanced Chemical Vapor Deposition
%J Solar RRL
%V 8
%N 9
%@ 2367-198X
%C Weinheim
%I Wiley-VCH
%M FZJ-2024-02193
%P 2400095
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001193252000001
%R 10.1002/solr.202400095
%U https://juser.fz-juelich.de/record/1024472