001024649 001__ 1024649
001024649 005__ 20250203103139.0
001024649 0247_ $$2doi$$a10.1002/pssa.202300066
001024649 0247_ $$2ISSN$$a1862-6300
001024649 0247_ $$2ISSN$$a0031-8965
001024649 0247_ $$2ISSN$$a1521-396X
001024649 0247_ $$2ISSN$$a(1970-2004)
001024649 0247_ $$2ISSN$$a1862-6319
001024649 0247_ $$2ISSN$$a(2005-2017)
001024649 0247_ $$2datacite_doi$$a10.34734/FZJ-2024-02322
001024649 0247_ $$2WOS$$aWOS:001004594600001
001024649 037__ $$aFZJ-2024-02322
001024649 041__ $$aEnglish
001024649 082__ $$a530
001024649 1001_ $$00000-0002-0276-9388$$aFrentzen, Michael$$b0$$eCorresponding author
001024649 245__ $$aFabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping
001024649 260__ $$aWeinheim$$bWiley-VCH$$c2023
001024649 3367_ $$2DRIVER$$aarticle
001024649 3367_ $$2DataCite$$aOutput Types/Journal article
001024649 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1713425006_22471
001024649 3367_ $$2BibTeX$$aARTICLE
001024649 3367_ $$2ORCID$$aJOURNAL_ARTICLE
001024649 3367_ $$00$$2EndNote$$aJournal Article
001024649 536__ $$0G:(DE-HGF)POF4-5353$$a5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535)$$cPOF4-535$$fPOF IV$$x0
001024649 588__ $$aDataset connected to CrossRef, Journals: juser.fz-juelich.de
001024649 7001_ $$00000-0003-3487-3099$$aMichailow, Michail$$b1
001024649 7001_ $$0P:(DE-Juel1)174238$$aRan, Ke$$b2
001024649 7001_ $$00000-0002-9461-3080$$aWilck, Noël$$b3
001024649 7001_ $$0P:(DE-Juel1)130824$$aMayer, Joachim$$b4
001024649 7001_ $$00000-0002-5679-8205$$aSmith, Sean C.$$b5
001024649 7001_ $$00000-0001-5485-9142$$aKönig, Dirk$$b6
001024649 7001_ $$00000-0001-5136-9287$$aKnoch, Joachim$$b7
001024649 773__ $$0PERI:(DE-600)1481091-8$$a10.1002/pssa.202300066$$gVol. 220, no. 13, p. 2300066$$n13$$p2300066$$tPhysica status solidi / A$$v220$$x1862-6300$$y2023
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02.pdf$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02.gif?subformat=icon$$xicon$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02.jpg?subformat=icon-1440$$xicon-1440$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02.jpg?subformat=icon-180$$xicon-180$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/FabricationofUltrasmallSiEncapsulatedinSiliconDioxideandSiliconNitride_v02.jpg?subformat=icon-640$$xicon-640$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/Physica%20Status%20Solidi%20a%20-%202023%20-%20Frentzen%20-%20Fabrication%20of%20Ultrasmall%20Si%20Encapsulated%20in%20Silicon%20Dioxide%20and%20Silicon.pdf$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/Physica%20Status%20Solidi%20a%20-%202023%20-%20Frentzen%20-%20Fabrication%20of%20Ultrasmall%20Si%20Encapsulated%20in%20Silicon%20Dioxide%20and%20Silicon.gif?subformat=icon$$xicon$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/Physica%20Status%20Solidi%20a%20-%202023%20-%20Frentzen%20-%20Fabrication%20of%20Ultrasmall%20Si%20Encapsulated%20in%20Silicon%20Dioxide%20and%20Silicon.jpg?subformat=icon-1440$$xicon-1440$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/Physica%20Status%20Solidi%20a%20-%202023%20-%20Frentzen%20-%20Fabrication%20of%20Ultrasmall%20Si%20Encapsulated%20in%20Silicon%20Dioxide%20and%20Silicon.jpg?subformat=icon-180$$xicon-180$$yOpenAccess
001024649 8564_ $$uhttps://juser.fz-juelich.de/record/1024649/files/Physica%20Status%20Solidi%20a%20-%202023%20-%20Frentzen%20-%20Fabrication%20of%20Ultrasmall%20Si%20Encapsulated%20in%20Silicon%20Dioxide%20and%20Silicon.jpg?subformat=icon-640$$xicon-640$$yOpenAccess
001024649 909CO $$ooai:juser.fz-juelich.de:1024649$$pdnbdelivery$$pdriver$$pVDB$$popen_access$$popenaire
001024649 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)174238$$aForschungszentrum Jülich$$b2$$kFZJ
001024649 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130824$$aForschungszentrum Jülich$$b4$$kFZJ
001024649 9131_ $$0G:(DE-HGF)POF4-535$$1G:(DE-HGF)POF4-530$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5353$$aDE-HGF$$bKey Technologies$$lMaterials Systems Engineering$$vMaterials Information Discovery$$x0
001024649 9141_ $$y2024
001024649 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2023-10-21
001024649 915__ $$0LIC:(DE-HGF)CCBY4$$2HGFVOC$$aCreative Commons Attribution CC BY 4.0
001024649 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bPHYS STATUS SOLIDI A : 2022$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)3001$$2StatID$$aDEAL Wiley$$d2023-10-21$$wger
001024649 915__ $$0StatID:(DE-HGF)0113$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
001024649 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2023-10-21
001024649 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz$$d2023-10-21$$wger
001024649 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2023-10-21
001024649 920__ $$lyes
001024649 9201_ $$0I:(DE-Juel1)ER-C-2-20170209$$kER-C-2$$lMaterialwissenschaft u. Werkstofftechnik$$x0
001024649 980__ $$ajournal
001024649 980__ $$aVDB
001024649 980__ $$aUNRESTRICTED
001024649 980__ $$aI:(DE-Juel1)ER-C-2-20170209
001024649 9801_ $$aFullTexts