TY  - JOUR
AU  - Frentzen, Michael
AU  - Michailow, Michail
AU  - Ran, Ke
AU  - Wilck, Noël
AU  - Mayer, Joachim
AU  - Smith, Sean C.
AU  - König, Dirk
AU  - Knoch, Joachim
TI  - Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping
JO  - Physica status solidi / A
VL  - 220
IS  - 13
SN  - 1862-6300
CY  - Weinheim
PB  - Wiley-VCH
M1  - FZJ-2024-02322
SP  - 2300066
PY  - 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001004594600001
DO  - DOI:10.1002/pssa.202300066
UR  - https://juser.fz-juelich.de/record/1024649
ER  -