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@ARTICLE{Frentzen:1024649,
author = {Frentzen, Michael and Michailow, Michail and Ran, Ke and
Wilck, Noël and Mayer, Joachim and Smith, Sean C. and
König, Dirk and Knoch, Joachim},
title = {{F}abrication of {U}ltrasmall {S}i {E}ncapsulated in
{S}ilicon {D}ioxide and {S}ilicon {N}itride as {A}lternative
to {I}mpurity {D}oping},
journal = {Physica status solidi / A},
volume = {220},
number = {13},
issn = {1862-6300},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2024-02322},
pages = {2300066},
year = {2023},
cin = {ER-C-2},
ddc = {530},
cid = {I:(DE-Juel1)ER-C-2-20170209},
pnm = {5353 - Understanding the Structural and Functional Behavior
of Solid State Systems (POF4-535)},
pid = {G:(DE-HGF)POF4-5353},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001004594600001},
doi = {10.1002/pssa.202300066},
url = {https://juser.fz-juelich.de/record/1024649},
}