Hauptseite > Publikationsdatenbank > Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping > print |
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024 | 7 | _ | |a 10.1002/pssa.202300066 |2 doi |
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100 | 1 | _ | |a Frentzen, Michael |0 0000-0002-0276-9388 |b 0 |e Corresponding author |
245 | _ | _ | |a Fabrication of Ultrasmall Si Encapsulated in Silicon Dioxide and Silicon Nitride as Alternative to Impurity Doping |
260 | _ | _ | |a Weinheim |c 2023 |b Wiley-VCH |
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700 | 1 | _ | |a Michailow, Michail |0 0000-0003-3487-3099 |b 1 |
700 | 1 | _ | |a Ran, Ke |0 P:(DE-Juel1)174238 |b 2 |
700 | 1 | _ | |a Wilck, Noël |0 0000-0002-9461-3080 |b 3 |
700 | 1 | _ | |a Mayer, Joachim |0 P:(DE-Juel1)130824 |b 4 |
700 | 1 | _ | |a Smith, Sean C. |0 0000-0002-5679-8205 |b 5 |
700 | 1 | _ | |a König, Dirk |0 0000-0001-5485-9142 |b 6 |
700 | 1 | _ | |a Knoch, Joachim |0 0000-0001-5136-9287 |b 7 |
773 | _ | _ | |a 10.1002/pssa.202300066 |g Vol. 220, no. 13, p. 2300066 |0 PERI:(DE-600)1481091-8 |n 13 |p 2300066 |t Physica status solidi / A |v 220 |y 2023 |x 1862-6300 |
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