001024751 001__ 1024751
001024751 005__ 20250203103147.0
001024751 0247_ $$2doi$$a10.1016/j.ultramic.2023.113720
001024751 0247_ $$2ISSN$$a0304-3991
001024751 0247_ $$2ISSN$$a1879-2723
001024751 0247_ $$2pmid$$a37004492
001024751 0247_ $$2WOS$$aWOS:000973335500001
001024751 037__ $$aFZJ-2024-02417
001024751 082__ $$a570
001024751 1001_ $$00000-0001-5135-3920$$aLu, Haoyan$$b0
001024751 245__ $$aCharacterisation of engineered defects in extreme ultraviolet mirror substrates using lab-scale extreme ultraviolet reflection ptychography
001024751 260__ $$aAmsterdam$$bElsevier Science$$c2023
001024751 3367_ $$2DRIVER$$aarticle
001024751 3367_ $$2DataCite$$aOutput Types/Journal article
001024751 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1712664143_18041
001024751 3367_ $$2BibTeX$$aARTICLE
001024751 3367_ $$2ORCID$$aJOURNAL_ARTICLE
001024751 3367_ $$00$$2EndNote$$aJournal Article
001024751 520__ $$aPtychography is a lensless imaging technique that is aberration-free and capable of imaging both the amplitude and the phase of radiation reflected or transmitted from an object using iterative algorithms. Working with extreme ultraviolet (EUV) light, ptychography can provide better resolution than conventional optical microscopy and deeper penetration than scanning electron microscope. As a compact lab-scale EUV light sources, high harmonic generation meets the high coherence requirement of ptychography and gives more flexibilities in both budget and experimental time compared to synchrotrons. The ability to measure phase makes reflection-mode ptychography a good choice for characterising both the surface topography and the internal structural changes in EUV multilayer mirrors. This paper describes the use of reflection-mode ptychography with a lab-scale high harmonic generation based EUV light source to perform quantitative measurement of the amplitude and phase reflection from EUV multilayer mirrors with engineered substrate defects. Using EUV light at 29.6 nm from a tabletop high harmonic generation light source, a lateral resolution down to and a phase resolution of (equivalent to topographic height variation of 0.27 nm) are achieved. The effect of surface distortion and roughness on EUV reflectivity is compared to topographic properties of the mirror defects measured using both atomic force microscopy and scanning transmission electron microscopy. Modelling of reflection properties from multilayer mirrors is used to predict the potential of a combination of on-resonance, actinic ptychographic imaging at 13.5 nm and atomic force microscopy for characterising the changes in multilayered structures.
001024751 536__ $$0G:(DE-HGF)POF4-5234$$a5234 - Emerging NC Architectures (POF4-523)$$cPOF4-523$$fPOF IV$$x0
001024751 588__ $$aDataset connected to CrossRef, Journals: juser.fz-juelich.de
001024751 7001_ $$0P:(DE-HGF)0$$aOdstrčil, Michal$$b1
001024751 7001_ $$0P:(DE-HGF)0$$aPooley, Charles$$b2
001024751 7001_ $$0P:(DE-HGF)0$$aBiller, Jan$$b3
001024751 7001_ $$0P:(DE-HGF)0$$aMebonia, Mikheil$$b4
001024751 7001_ $$0P:(DE-HGF)0$$aHe, Guanze$$b5
001024751 7001_ $$0P:(DE-HGF)0$$aPraeger, Matthew$$b6
001024751 7001_ $$0P:(DE-Juel1)157957$$aJuschkin, Larissa$$b7
001024751 7001_ $$0P:(DE-HGF)0$$aFrey, Jeremy$$b8
001024751 7001_ $$0P:(DE-HGF)0$$aBrocklesby, William$$b9$$eCorresponding author
001024751 773__ $$0PERI:(DE-600)1479043-9$$a10.1016/j.ultramic.2023.113720$$gVol. 249, p. 113720 -$$p113720 -$$tUltramicroscopy$$v249$$x0304-3991$$y2023
001024751 909CO $$ooai:juser.fz-juelich.de:1024751$$pVDB
001024751 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-HGF)0$$aRWTH Aachen$$b1$$kRWTH
001024751 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-HGF)0$$aRWTH Aachen$$b3$$kRWTH
001024751 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-HGF)0$$aForschungszentrum Jülich$$b3$$kFZJ
001024751 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-HGF)0$$aForschungszentrum Jülich$$b4$$kFZJ
001024751 9101_ $$0I:(DE-588b)36225-6$$6P:(DE-HGF)0$$aRWTH Aachen$$b4$$kRWTH
001024751 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)157957$$aForschungszentrum Jülich$$b7$$kFZJ
001024751 9131_ $$0G:(DE-HGF)POF4-523$$1G:(DE-HGF)POF4-520$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5234$$aDE-HGF$$bKey Technologies$$lNatural, Artificial and Cognitive Information Processing$$vNeuromorphic Computing and Network Dynamics$$x0
001024751 9141_ $$y2024
001024751 915__ $$0StatID:(DE-HGF)0420$$2StatID$$aNationallizenz$$d2023-10-21$$wger
001024751 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bULTRAMICROSCOPY : 2022$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0600$$2StatID$$aDBCoverage$$bEbsco Academic Search$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0030$$2StatID$$aPeer Review$$bASC$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)1050$$2StatID$$aDBCoverage$$bBIOSIS Previews$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0113$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)1030$$2StatID$$aDBCoverage$$bCurrent Contents - Life Sciences$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)1190$$2StatID$$aDBCoverage$$bBiological Abstracts$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2023-10-21
001024751 915__ $$0StatID:(DE-HGF)9900$$2StatID$$aIF < 5$$d2023-10-21
001024751 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
001024751 9201_ $$0I:(DE-82)080009_20140620$$kJARA-FIT$$lJARA-FIT$$x1
001024751 980__ $$ajournal
001024751 980__ $$aVDB
001024751 980__ $$aI:(DE-Juel1)PGI-9-20110106
001024751 980__ $$aI:(DE-82)080009_20140620
001024751 980__ $$aUNRESTRICTED