%0 Journal Article
%A Neul, Malte
%A Sprave, Isabelle V.
%A Diebel, Laura K.
%A Zinkl, Lukas G.
%A Fuchs, Florian
%A Yamamoto, Yuji
%A Vedder, Christian
%A Bougeard, Dominique
%A Schreiber, Lars R.
%T Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K
%J Physical review materials
%V 8
%N 4
%@ 2475-9953
%C College Park, MD
%I APS
%M FZJ-2024-02856
%P 043801
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001218544300002
%R 10.1103/PhysRevMaterials.8.043801
%U https://juser.fz-juelich.de/record/1025397