TY  - JOUR
AU  - Neul, Malte
AU  - Sprave, Isabelle V.
AU  - Diebel, Laura K.
AU  - Zinkl, Lukas G.
AU  - Fuchs, Florian
AU  - Yamamoto, Yuji
AU  - Vedder, Christian
AU  - Bougeard, Dominique
AU  - Schreiber, Lars R.
TI  - Local laser-induced solid-phase recrystallization of phosphorus-implanted Si/SiGe heterostructures for contacts below 4.2 K
JO  - Physical review materials
VL  - 8
IS  - 4
SN  - 2475-9953
CY  - College Park, MD
PB  - APS
M1  - FZJ-2024-02856
SP  - 043801
PY  - 2024
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001218544300002
DO  - DOI:10.1103/PhysRevMaterials.8.043801
UR  - https://juser.fz-juelich.de/record/1025397
ER  -