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@ARTICLE{Neul:1025397,
      author       = {Neul, Malte and Sprave, Isabelle V. and Diebel, Laura K.
                      and Zinkl, Lukas G. and Fuchs, Florian and Yamamoto, Yuji
                      and Vedder, Christian and Bougeard, Dominique and Schreiber,
                      Lars R.},
      title        = {{L}ocal laser-induced solid-phase recrystallization of
                      phosphorus-implanted {S}i/{S}i{G}e heterostructures for
                      contacts below 4.2 {K}},
      journal      = {Physical review materials},
      volume       = {8},
      number       = {4},
      issn         = {2475-9953},
      address      = {College Park, MD},
      publisher    = {APS},
      reportid     = {FZJ-2024-02856},
      pages        = {043801},
      year         = {2024},
      cin          = {PGI-11},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-11-20170113},
      pnm          = {5221 - Advanced Solid-State Qubits and Qubit Systems
                      (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5221},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001218544300002},
      doi          = {10.1103/PhysRevMaterials.8.043801},
      url          = {https://juser.fz-juelich.de/record/1025397},
}