% IMPORTANT: The following is UTF-8 encoded. This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.
@ARTICLE{Persson:1026293,
author = {Persson, Bo and Mate, C. Mathew},
title = {{R}ole of humidity and surface roughness on direct wafer
bonding},
journal = {The European physical journal / B},
volume = {97},
number = {4},
issn = {1434-6028},
address = {Heidelberg},
publisher = {Springer},
reportid = {FZJ-2024-03364},
pages = {46},
year = {2024},
abstract = {Bodies made from elastically stiff material usually bind
very weakly unless the surfaces are flat and extremely
smooth. In direct wafer bonding flat surfaces bind by
capillary bridges and by the van der Waals interaction,
which act between all solid objects. Here we study the
dependency of the work of adhesion on the humidity and
surface roughness in hydrophilic direct wafer bonding. We
show that the long-wavelength roughness (usually denoted
waviness) has a negligible influence on the strength of
wafer bonding (the work of adhesion) from the menisci that
form from capillary condensation of water vapor.},
cin = {PGI-1},
ddc = {530},
cid = {I:(DE-Juel1)PGI-1-20110106},
pnm = {5211 - Topological Matter (POF4-521)},
pid = {G:(DE-HGF)POF4-5211},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001204807200002},
doi = {10.1140/epjb/s10051-024-00680-w},
url = {https://juser.fz-juelich.de/record/1026293},
}