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@INPROCEEDINGS{Stern:1026302,
      author       = {Stern, Christian and Schwab, Christian and Kindelmann,
                      Moritz and Stamminger, Mark and Park, Inhee and Bram, Martin
                      and Guillon, Olivier},
      title        = {{R}eactive spark plasma sintering of ceramics with garnet
                      structure for plasma etching applications},
      reportid     = {FZJ-2024-03373},
      year         = {2024},
      abstract     = {Yttrium-Aluminum-Garnet (YAG) is an advanced structural
                      ceramic that has desirable properties for halogen plasma
                      etching chambers used in semiconductor processing. The trend
                      towards more aggressive etching environments requires new
                      material systems with enhanced plasma resistance. To tackle
                      this issue, there is an increasing interest in understanding
                      the specific erosion mechanisms of etch-resistant ceramics.
                      In this study, we present a novel approach to manufacture
                      highly dense ceramics with garnet structure by means of
                      reactive spark plasma sintering of the respective oxides.
                      Targeting on improved plasma resistance compared to YAG, Y
                      was completely replaced by lanthanides (Lu, Yb, Er) enabling
                      us to clarify the role of these lanthanides in the YAG-type
                      structure on the plasma-material interaction. For
                      characterization, all samples were exposed to fluorine-based
                      etching plasmas (CF4/O2/Ar) using an inductively coupled
                      plasma (ICP) etch chamber. The resulting topography was
                      characterized by atomic force microscopy (AFM). Under the
                      given conditions, no physical erosion could be detected and
                      the formation of a reaction layer was the dominating
                      phenomenon. The induced chemical gradient has been analyzed
                      by means of SIMS and STEM. Our results reveal the reaction
                      layer is significantly altered if Y is replaced by
                      lanthanides, which provides a route to study mechanisms of
                      the plasma corrosion process.},
      month         = {Jan},
      date          = {2024-01-28},
      organization  = {48th International Conference and Expo
                       on Advanced Ceramics and Composites,
                       Daytona Beach (USA), 28 Jan 2024 - 2
                       Feb 2024},
      subtyp        = {After Call},
      cin          = {IEK-1 / ER-C-2 / IEK-9 / JARA-ENERGY},
      cid          = {I:(DE-Juel1)IEK-1-20101013 / I:(DE-Juel1)ER-C-2-20170209 /
                      I:(DE-Juel1)IEK-9-20110218 / $I:(DE-82)080011_20140620$},
      pnm          = {899 - ohne Topic (POF4-899)},
      pid          = {G:(DE-HGF)POF4-899},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/1026302},
}