%0 Journal Article
%A Yang, Qing
%A Duan, Weiyuan
%A Eberst, Alexander
%A Klingebiel, Benjamin
%A Wang, Yueming
%A Kulkarni, Ashish
%A Lambertz, Andreas
%A Bittkau, Karsten
%A Zhang, Yongqiang
%A Vitusevich, Svetlana
%A Rau, Uwe
%A Kirchartz, Thomas
%A Ding, Kaining
%T Origin of sputter damage during transparent conductive oxide deposition for semitransparent perovskite solar cells
%J Journal of materials chemistry / A
%V 12
%@ 2050-7488
%C London ˜[u.a.]œ
%I RSC
%M FZJ-2024-03565
%P  14816-14827 
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001204136700001
%R 10.1039/D3TA06654A
%U https://juser.fz-juelich.de/record/1026997