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001026997 245__ $$aOrigin of sputter damage during transparent conductive oxide deposition for semitransparent perovskite solar cells
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001026997 7001_ $$0P:(DE-Juel1)169946$$aDuan, Weiyuan$$b1$$eCorresponding author$$ufzj
001026997 7001_ $$0P:(DE-Juel1)178007$$aEberst, Alexander$$b2$$ufzj
001026997 7001_ $$0P:(DE-Juel1)159235$$aKlingebiel, Benjamin$$b3$$ufzj
001026997 7001_ $$0P:(DE-Juel1)188117$$aWang, Yueming$$b4$$ufzj
001026997 7001_ $$0P:(DE-Juel1)180881$$aKulkarni, Ashish$$b5$$ufzj
001026997 7001_ $$0P:(DE-Juel1)130263$$aLambertz, Andreas$$b6$$ufzj
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001026997 7001_ $$0P:(DE-Juel1)159457$$aKirchartz, Thomas$$b11
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