%0 Journal Article
%A Eberst, Alexander
%A Xu, Binbin
%A Bittkau, Karsten
%A Duan, Weiyuan
%A Lambertz, Andreas
%A Meise, Ansgar
%A Heggen, Marc
%A Dunin-Borkowski, Rafal E.
%A Rau, Uwe
%A Ding, Kaining
%T Deeper Insight into the Mechanisms Behind Sputter Damage in Silicon Solar Cells Based on the Example of Nanocrystalline Silicon Carbide
%J Advanced physics research
%V 3
%N 9
%@ 2751-1200
%C Weinheim
%I Wiley-VCH GmbH
%M FZJ-2024-04709
%P 2400036
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001261412700001
%R 10.1002/apxr.202400036
%U https://juser.fz-juelich.de/record/1028642