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100 1 _ |a Ji, K.
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245 _ _ |a Origin of giant enhancement of phase contrast in electron holography of modulation-doped n -type GaN
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520 _ _ |a The electron optical phase contrast probed by electron holography at n-n+ GaN doping steps is found to exhibit a giant enhancement, in sharp contrast to the always smaller than expected phase contrast reported for p-n junctions. We unravel the physical origin of the giant enhancement by combining off-axis electron holography data with self-consistent electrostatic potential calculations. The predominant contribution to the phase contrast is shown to arise from the doping dependent screening length of the surface Fermi-level pinning, which is induced by FIB-implanted carbon point defects below the outer amorphous shell. The contribution of the built-in potential is negligible for modulation doping and only relevant for large built-in potentials at e.g. p-n junctions. This work provides a quantitative approach to so-called dead layers at TEM lamellas.
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700 1 _ |a Schnedler, M.
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700 1 _ |a Lan, Q.
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700 1 _ |a Carlin, J.-F.
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700 1 _ |a Butté, R.
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700 1 _ |a Grandjean, N.
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700 1 _ |a Dunin-Borkowski, R. E.
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700 1 _ |a Ebert, Philipp
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773 _ _ |a 10.1016/j.ultramic.2024.114006
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