TY  - JOUR
AU  - Corley-Wiciak, Cedric
AU  - Zoellner, Marvin H.
AU  - Corley-Wiciak, Agnieszka A.
AU  - Rovaris, Fabrizio
AU  - Zatterin, Edoardo
AU  - Zaitsev, Ignatii
AU  - Sfuncia, Gianfranco
AU  - Nicotra, Giuseppe
AU  - Spirito, Davide
AU  - von den Driesch, Nils
AU  - Manganelli, Costanza L.
AU  - Marzegalli, Anna
AU  - Schulli, Tobias U.
AU  - Buca, Dan
AU  - Montalenti, Francesco
AU  - Capellini, Giovanni
AU  - Richter, Carsten
TI  - Full Picture of Lattice Deformation in a Ge 1-x Sn x Micro‐Disk by 5D X‐ray Diffraction Microscopy
JO  - Small Methods
VL  - 8
IS  - 12
SN  - 2366-9608
CY  - Weinheim
PB  - WILEY-VCH Verlag GmbH & Co. KGaA
M1  - FZJ-2024-05124
SP  - 2400598
PY  - 2024
AB  - Lattice strain in crystals can be exploited to effectively tune their physical properties. In microscopic structures, experimental access to the full strain tensor with spatial resolution at the (sub-)micrometer scale is at the same time very interesting and challenging. In this work, how scanning X-ray diffraction microscopy, an emerging model-free method based on synchrotron radiation, can shed light on the complex, anisotropic deformation landscape within three dimensional (3D) microstructures is shown. This technique allows the reconstruction of all lattice parameters within any type of crystal with submicron spatial resolution and requires no sample preparation. Consequently, the local state of deformation can be fully quantified. Exploiting this capability, all components of the strain tensor in a suspended, strained Ge1 − xSnx /Ge microdisk are mapped. Subtle elastic deformations are unambiguously correlated with structural defects, 3D microstructure geometry, and chemical variations, as verified by comparison with complementary electron microscopy and finite element simulations. The methodology described here is applicable to a wide range of fields, from bioengineering to metallurgy and semiconductor research.
LB  - PUB:(DE-HGF)16
C6  - 39075823
UR  - <Go to ISI:>//WOS:001280201100001
DO  - DOI:10.1002/smtd.202400598
UR  - https://juser.fz-juelich.de/record/1029435
ER  -