%0 Journal Article
%A von den Driesch, Nils
%A Kutovyi, Yurii
%A Khamphasithivong, Felix
%A Zass, Anja
%A Schreiber, Lars R.
%A Pawlis, Alexander
%T Shadow Wall Epitaxy of Compound Semiconductors toward All in Situ Fabrication of Quantum Devices
%J ACS applied electronic materials
%V 6
%@ 2637-6113
%C Washington, DC
%I ACS Publications
%M FZJ-2024-05508
%P 6246
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001294165900001
%R 10.1021/acsaelm.4c01104
%U https://juser.fz-juelich.de/record/1030914