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@INPROCEEDINGS{Faley:1031848,
      author       = {Faley, Michael and Vas, J. V. and Lu, P.-H. and
                      Dunin-Borkowski, R. E.},
      title        = {{N}ano{SQUID}s with proximity effect nanobridge {J}osephson
                      junctions and {P}y nanostructures},
      reportid     = {FZJ-2024-05859},
      year         = {2024},
      abstract     = {Nanoscale superconducting quantum interference devices
                      (nanoSQUIDs) with nanobridge Josephson junctions (nJJs) were
                      prepared on SiN and SiC membranes for experiments in a
                      transmission electron microscope (TEM) at temperatures below
                      10 K. As thin-film materials for the nanobridges, metals Ti
                      and Nb or nitrides TiN and NbN were combined into 3-layer
                      heterostructures for adjusting superconducting parameters
                      through the proximity effect. This allowed to reduce spread
                      of parameters in ultrathin superconducting films and to fit
                      operation temperature to the most stable temperature of the
                      commercial TEM sample holder that was cooled using flow of
                      liquid helium. The sample holder thermometer was also used
                      as a heater, allowing the sample temperature to be brought
                      from 600 K to 5 K and back in a few seconds. The nanoSQUIDs
                      had a sub-micrometer loop size, which limited the dimensions
                      of the nJJs to below ~100 nm. Electron beam lithography and
                      high selectivity reactive ion etching with pure SF6 gas were
                      used to pattern nJJs with down to 10 nm width that is
                      comparable to coherence length in thin films of Nb and NbN
                      and provide a better reproducibility in the case of Nb
                      functional layer but a better long term stability due to an
                      enhanced corrosion resistance in the case of NbN layer.
                      Nanoscale superconducting quantum interference devices
                      (nanoSQUIDs) with nanobridge Josephson junctions (nJJs) were
                      prepared at a distance of below 200 nm from the tip of a
                      cantilever by using a focused ion beam to achieve bulk
                      nanosculpturing of the substrate. High-resolution TEM
                      revealed that NbN films on SiN have a columnar structure
                      while they observe cube-on-cube epitaxial growth on SiC
                      membranes. Measurements revealed non-hysteretic I(V)
                      characteristics of the nJJs and nanoSQUIDs, peak-to-peak
                      quantum oscillations in the V(B)-characteristics of the
                      nanoSQUIDs with an amplitude of >20 µV and a white noise
                      spin resolution of approximately 400 μB/√Hz that was
                      obtained without use of SQUID array preamplifier. Towards
                      future realization of hybrid superconductor-ferromagnetic
                      nanostructures for spintronics experiments in TEM, Permalloy
                      (Py) nanodots and triangles with dimensions down to ~100 nm
                      were prepared on SiN membranes and studied by Lorentz
                      microscopy and electron holography TEM methods. These
                      technologies are promising for the fabrication of
                      superconducting electronics based on nJJs for operation
                      inside a TEM.},
      month         = {Sep},
      date          = {2024-09-01},
      organization  = {Applied Superconductivity Conference,
                       Salt Lake City (USA), 1 Sep 2024 - 6
                       Sep 2024},
      subtyp        = {After Call},
      cin          = {ER-C-1},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {5351 - Platform for Correlative, In Situ and Operando
                      Characterization (POF4-535) / 3D MAGiC - Three-dimensional
                      magnetization textures: Discovery and control on the
                      nanoscale (856538)},
      pid          = {G:(DE-HGF)POF4-5351 / G:(EU-Grant)856538},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/1031848},
}