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@ARTICLE{Faley:1034866,
author = {Faley, Michael I. and Vas, Joseph Vimal and Lu, Penghan and
Dunin-Borkowski, Rafal},
title = {{N}ano{SQUID}s {W}ith {P}roximity {E}ffect {N}anobridge
{J}osephson {J}unctions for {F}uture {A}pplications in
{E}lectron {M}icroscopy},
journal = {IEEE transactions on applied superconductivity},
volume = {35},
number = {5},
issn = {1051-8223},
address = {New York, NY},
publisher = {IEEE},
reportid = {FZJ-2024-07612},
pages = {1600105},
year = {2025},
abstract = {Nanoscale superconducting quantum interference devices
(nanoSQUIDs) with nanobridge Josephson junctions (nJJs) were
prepared on SiN membranes for experiments with transmission
electron microscope (TEM) at temperatures below 10 K. As
thin-film materials for the nanobridges, metals Ti and Nb
were combined into 3-layer heterostructures for adjusting
superconducting parameters of the nJJs through the proximity
effect. This allowed to reduce spread of parameters in
ultrathin superconducting films and to adjust operating
temperature of nJJs to the optimum operating temperature of
the commercial TEM sample holders cooled using liquid
helium. Electron beam lithography and high selectivity
reactive ion etching with pure SF6 gas were used to pattern
nJJs with down to 10 nm width that is comparable to
coherence length in thin films of Nb. Measurements revealed
non-hysteretic I(V) characteristics of the nJJs and
nanoSQUIDs. The paper is mainly devoted to the development
of nanoSQUIDs for possible applications in TEM. Towards
realization of hybrid superconductor-ferromagnetic
nanostructures for further experiments in TEM, Permalloy
triangles with spatial resolution down to ~100 nm were
prepared on similar SiN membranes and studied by Lorentz TEM
method. These technologies are promising for the fabrication
of superconducting electronics based on nJJs for operation
inside a TEM.},
month = {Sep},
date = {2024-09-01},
organization = {The Applied Superconductivity
Conference, Salt Lake City (USA), 1 Sep
2024 - 6 Sep 2024},
cin = {ER-C-1},
ddc = {620},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {5351 - Platform for Correlative, In Situ and Operando
Characterization (POF4-535)},
pid = {G:(DE-HGF)POF4-5351},
typ = {PUB:(DE-HGF)8 / PUB:(DE-HGF)16},
UT = {WOS:001380658400025},
doi = {10.1109/TASC.2024.3502572},
url = {https://juser.fz-juelich.de/record/1034866},
}