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@INPROCEEDINGS{AzuaHumara:1034901,
      author       = {Azua Humara, Ana Daniela and Schierholz, Roland},
      othercontributors = {Camara, Osmane and Ahmed, Jehad},
      title        = {{S}canning {E}lectron {M}icroscopy ({SEM})},
      school       = {RWTH Aachen},
      reportid     = {FZJ-2025-00024},
      year         = {2024},
      abstract     = {As with other microscopes, the main function of the
                      Scanning Electron Microscope (SEM) is to examine small
                      objects that are imperceptible to human sight. It does that
                      by striking the sample surface with an electron beam of high
                      energy. [1] These incident electrons, also called primary
                      electrons, penetrate the sample promoting a variety of
                      signals, including secondary electrons (SE), backscattered
                      electrons (BSE), and X-ray emissions (Figure 1). [2] As each
                      signal provides different information about the sample, it
                      is important to understand the electron beam-sample
                      interaction.The signals can be regulated by adjusting the
                      parameters of the setup of the SEM. The three major
                      components are the following: i. The electron column, where
                      the electron beam is generated from an electron gun. The
                      beam then travels towards the sample, focused by
                      electromagnetic lenses. [2]ii. The sample chamber is located
                      at the base of the electron column and is kept under vacuum.
                      In there, the beam strikes the sample and SE, BSE and X-Ray
                      are emitted. Next, the detectors collect and convert the
                      signals into electrical pulses for latter processing.
                      [1]iii. The electronic controls are represented by the
                      interface of the SEM with the operator. It allows the user
                      to handle the microscope and control the acquisition of
                      information.Thus, the electron beam-sample interaction, the
                      type of signals obtained, and the fundamental adjustment of
                      the setup are the key topics to be addressed, so that
                      high-quality information can be acquired by the operator of
                      the SEM.},
      month         = {Aug},
      date          = {2024-08-26},
      organization  = {Electrochemistry Day 2024, Cologne
                       (Germany), 26 Aug 2024 - 27 Aug 2024},
      subtyp        = {Other},
      cin          = {IET-1},
      cid          = {I:(DE-Juel1)IET-1-20110218},
      pnm          = {1231 - Electrochemistry for Hydrogen (POF4-123) / HITEC -
                      Helmholtz Interdisciplinary Doctoral Training in Energy and
                      Climate Research (HITEC) (HITEC-20170406) / BMBF 03SF0589B -
                      Verbundvorhaben iNEW: Inkubator Nachhaltige Elektrochemische
                      Wertschöpfungsketten (iNEW) im Rahmen des Gesamtvorhabens
                      Accelerator Nachhaltige Bereitstellung Elektrochemisch
                      Erzeugter Kraft- und Wertstoffe mittels Power-to-X (ANABEL)
                      (03SF0589B)},
      pid          = {G:(DE-HGF)POF4-1231 / G:(DE-Juel1)HITEC-20170406 /
                      G:(BMBF)03SF0589B},
      typ          = {PUB:(DE-HGF)31},
      url          = {https://juser.fz-juelich.de/record/1034901},
}