%0 Journal Article
%A Fischer, Benedikt
%A Nuys, Maurice
%A Haas, Stefan
%A Thimm, Oliver
%A Schöpe, Gunnar
%A Foucart, Pascal
%A Besmehn, Astrid
%A Rau, Uwe
%T Synthesis and Characterization of Nitrogen-Doped Crystallized SiC Films from Liquid Precursors
%J ACS applied electronic materials
%V 7
%N 2
%@ 2637-6113
%C Washington, DC
%I ACS Publications
%M FZJ-2025-01676
%P acsaelm.4c01992
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001406251000001
%R 10.1021/acsaelm.4c01992
%U https://juser.fz-juelich.de/record/1038860