TY - JOUR
AU - Fischer, Benedikt
AU - Nuys, Maurice
AU - Haas, Stefan
AU - Thimm, Oliver
AU - Schöpe, Gunnar
AU - Foucart, Pascal
AU - Besmehn, Astrid
AU - Rau, Uwe
TI - Synthesis and Characterization of Nitrogen-Doped Crystallized SiC Films from Liquid Precursors
JO - ACS applied electronic materials
VL - 7
IS - 2
SN - 2637-6113
CY - Washington, DC
PB - ACS Publications
M1 - FZJ-2025-01676
SP - acsaelm.4c01992
PY - 2025
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:001406251000001
DO - DOI:10.1021/acsaelm.4c01992
UR - https://juser.fz-juelich.de/record/1038860
ER -