TY  - JOUR
AU  - Fischer, Benedikt
AU  - Nuys, Maurice
AU  - Haas, Stefan
AU  - Thimm, Oliver
AU  - Schöpe, Gunnar
AU  - Foucart, Pascal
AU  - Besmehn, Astrid
AU  - Rau, Uwe
TI  - Synthesis and Characterization of Nitrogen-Doped Crystallized SiC Films from Liquid Precursors
JO  - ACS applied electronic materials
VL  - 7
IS  - 2
SN  - 2637-6113
CY  - Washington, DC
PB  - ACS Publications
M1  - FZJ-2025-01676
SP  - acsaelm.4c01992
PY  - 2025
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001406251000001
DO  - DOI:10.1021/acsaelm.4c01992
UR  - https://juser.fz-juelich.de/record/1038860
ER  -