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@ARTICLE{Fischer:1038860,
      author       = {Fischer, Benedikt and Nuys, Maurice and Haas, Stefan and
                      Thimm, Oliver and Schöpe, Gunnar and Foucart, Pascal and
                      Besmehn, Astrid and Rau, Uwe},
      title        = {{S}ynthesis and {C}haracterization of {N}itrogen-{D}oped
                      {C}rystallized {S}i{C} {F}ilms from {L}iquid {P}recursors},
      journal      = {ACS applied electronic materials},
      volume       = {7},
      number       = {2},
      issn         = {2637-6113},
      address      = {Washington, DC},
      publisher    = {ACS Publications},
      reportid     = {FZJ-2025-01676},
      pages        = {acsaelm.4c01992},
      year         = {2025},
      cin          = {IMD-3},
      ddc          = {620},
      cid          = {I:(DE-Juel1)IMD-3-20101013},
      pnm          = {1212 - Materials and Interfaces (POF4-121)},
      pid          = {G:(DE-HGF)POF4-1212},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001406251000001},
      doi          = {10.1021/acsaelm.4c01992},
      url          = {https://juser.fz-juelich.de/record/1038860},
}