% IMPORTANT: The following is UTF-8 encoded. This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.
@INPROCEEDINGS{Faley:1040661,
author = {Faley, Michael and Thomsen, Joachim and Lu, Penghan and
Vas, Joseph Vimal and Tavabi, Amir Hossein and
Dunin-Borkowski, Rafal},
title = {{S}uperconducting nanostructures and 2{D} superconducting
materials for operation in transmission electron
microscopes},
reportid = {FZJ-2025-01992},
year = {2025},
abstract = {Transmission electron microscopy enables high-resolution
imaging and spectroscopy on active quantum devices. Here, we
develop new technologies for operation of low-Tc and high-Tc
superconducting nanostructures inside transmission electron
microscope (TEM) in order to study their functionality down
to atomic level and temperatures down to 5 K. As thin-film
materials for the nanobridges, metals Ti and Nb were
combined into 3-layer heterostructures for adjusting
superconducting parameters of the nanobridge Josephson
junctions (nJJs) through the proximity effect. This allowed
to reduce spread of parameters (Tc, Ic, etc.) in ultrathin
superconducting films and to adjust operating temperature of
nJJs to the most stable operating temperature of the
commercial TEM sample holders cooled using liquid helium.
Cross-sectional TEM images of the Ti-Nb-Ti thin-film
heterostructure were obtained and revealed epitaxial growth.
Electron beam lithography and high selectivity reactive ion
etching with pure SF6 gas were used to pattern nJJs with
down to 10 nm width that is comparable to coherence length
in thin films of Nb. Nanoscale superconducting quantum
interference devices (nanoSQUIDs) with nJJs were prepared on
home-made SiN membrane and observed with TEM (Fig. 1a).
NanoSQUIDs were also prepared at a distance of below 200 nm
from the tip of a cantilever by using a focused ion beam to
achieve bulk nanosculpturing of the substrate. Measurements
revealed non-hysteretic I(V) characteristics of the nJJs and
nanoSQUIDs at operation temperature 5 K. 100-nm-thick NbSe2
flakes were transferred onto SiN membrane with Au contact
leads and a hole (Fig. 1b) and measured in TEM down to the
temperature below its Tc =7 K. High-Tc nanoSQUIDs were
realized with step-edge Josephson junctions. To realize
hybrid superconductor-ferromagnetic nanostructures for
further experiments in TEM, Permalloy nanodisks and
triangles with dimensions down to ~100 nm were prepared on
similar SiN membranes and studied by Lorentz microscopy and
electron holography methods. These technologies are
promising for the fabrication of superconducting electronics
for operation inside a TEM.},
month = {Feb},
date = {2025-02-19},
organization = {Conference on Superconductivity and
Functional Oxides, L'Aquila (Italy), 19
Feb 2025 - 21 Feb 2025},
subtyp = {After Call},
cin = {ER-C-1},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {5351 - Platform for Correlative, In Situ and Operando
Characterization (POF4-535)},
pid = {G:(DE-HGF)POF4-5351},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/1040661},
}