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@ARTICLE{Smart:1042423,
author = {Smart, Thomas J and Abali, Bilen Emek and Boschker, Hans
and Braun, Wolfgang},
title = {{D}eposition rates in thermal laser epitaxy: simulation and
experiment},
journal = {Journal of physics / D},
volume = {58},
number = {20},
issn = {0508-3443},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {FZJ-2025-02571},
pages = {205303 -},
year = {2025},
abstract = {The modeling of deposition rates in thermal laser epitaxy
(TLE) is essential for the accurateprediction of the
evaporation process and for improved dynamic process
control. Wedemonstrate excellent agreement between
experimental data and a model based on a finiteelement
simulation that describes the temperature distribution of an
elemental source whenirradiated with continuous wave laser
radiation. The simulation strongly depends on
thethermophysical constants of the material, thermal
conductivity, specific heat capacity, density,reflectivity
and thermal emissivity, data of which is lacking for many
elements. Effective valuesfor the parameters may be
determined with precision by means of an unambiguous
referenceprovided by the melting point of the material,
which is directly observed during theexperiments. TLE may
therefore be used to study the high temperature
thermophysical andoptical properties of the elements.},
cin = {PGI-9},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {5222 - Exploratory Qubits (POF4-522)},
pid = {G:(DE-HGF)POF4-5222},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001473349200001},
doi = {10.1088/1361-6463/adcb4d},
url = {https://juser.fz-juelich.de/record/1042423},
}