% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@TECHREPORT{Fischer:1044180,
      author       = {Fischer, Benedikt and Nuys, Maurice and Schaaf, Michael},
      title        = {{D}ünnschichten aus {S}ilizium hergestellt durch {CVD}
                      mittels {F}lüssigsilanen mit einstellbarem
                      {K}ohlenstoffgehalt},
      reportid     = {FZJ-2025-03069},
      year         = {2025},
      cin          = {IMD-3},
      cid          = {I:(DE-Juel1)IMD-3-20101013},
      pnm          = {1211 - Wind Energy Technology (POF4-121) / 5215 - Towards
                      Quantum and Neuromorphic Computing Functionalities
                      (POF4-521)},
      pid          = {G:(DE-HGF)POF4-1211 / G:(DE-HGF)POF4-5215},
      typ          = {PUB:(DE-HGF)23},
      url          = {https://juser.fz-juelich.de/record/1044180},
}