guest ::
| Home > Publications database > Dünnschichten aus Silizium hergestellt durch CVD mittels Flüssigsilanen mit einstellbarem Kohlenstoffgehalt > print |
| Home > Publications database > Dünnschichten aus Silizium hergestellt durch CVD mittels Flüssigsilanen mit einstellbarem Kohlenstoffgehalt > print |
| 001 | 1044180 | ||
| 005 | 20250717202255.0 | ||
| 013 | _ | _ | |a DE102023118799A1 |
| 024 | 7 | _ | |a DE 102023118799 |2 Patent |
| 037 | _ | _ | |a FZJ-2025-03069 |
| 041 | _ | _ | |a German |
| 100 | 1 | _ | |a Fischer, Benedikt |0 P:(DE-Juel1)167513 |b 0 |u fzj |
| 245 | _ | _ | |a Dünnschichten aus Silizium hergestellt durch CVD mittels Flüssigsilanen mit einstellbarem Kohlenstoffgehalt |
| 260 | _ | _ | |c 2025 |
| 336 | 7 | _ | |a PATENT |2 ORCID |
| 336 | 7 | _ | |a Patent |b patent |m patent |0 PUB:(DE-HGF)23 |s 1752733477_22032 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a patent |2 DRIVER |
| 336 | 7 | _ | |a TECHREPORT |2 BibTeX |
| 336 | 7 | _ | |a Patent |0 15 |2 EndNote |
| 336 | 7 | _ | |a Patent |2 DataCite |
| 536 | _ | _ | |a 1211 - Wind Energy Technology (POF4-121) |0 G:(DE-HGF)POF4-1211 |c POF4-121 |f POF IV |x 0 |
| 536 | _ | _ | |a 5215 - Towards Quantum and Neuromorphic Computing Functionalities (POF4-521) |0 G:(DE-HGF)POF4-5215 |c POF4-521 |f POF IV |x 1 |
| 700 | 1 | _ | |a Nuys, Maurice |0 P:(DE-Juel1)130277 |b 1 |u fzj |
| 700 | 1 | _ | |a Schaaf, Michael |0 P:(DE-Juel1)180816 |b 2 |u fzj |
| 856 | 4 | _ | |u https://register.dpma.de/DPMAregister/pat/PatSchrifteneinsicht?docId=DE102023118799A1&page=1&lang=de |
| 909 | C | O | |o oai:juser.fz-juelich.de:1044180 |p VDB |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 0 |6 P:(DE-Juel1)167513 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 1 |6 P:(DE-Juel1)130277 |
| 910 | 1 | _ | |a Forschungszentrum Jülich |0 I:(DE-588b)5008462-8 |k FZJ |b 2 |6 P:(DE-Juel1)180816 |
| 913 | 1 | _ | |a DE-HGF |b Forschungsbereich Energie |l Materialien und Technologien für die Energiewende (MTET) |1 G:(DE-HGF)POF4-120 |0 G:(DE-HGF)POF4-121 |3 G:(DE-HGF)POF4 |2 G:(DE-HGF)POF4-100 |4 G:(DE-HGF)POF |v Photovoltaik und Windenergie |9 G:(DE-HGF)POF4-1211 |x 0 |
| 913 | 1 | _ | |a DE-HGF |b Key Technologies |l Natural, Artificial and Cognitive Information Processing |1 G:(DE-HGF)POF4-520 |0 G:(DE-HGF)POF4-521 |3 G:(DE-HGF)POF4 |2 G:(DE-HGF)POF4-500 |4 G:(DE-HGF)POF |v Quantum Materials |9 G:(DE-HGF)POF4-5215 |x 1 |
| 914 | 1 | _ | |y 2025 |
| 920 | _ | _ | |l yes |
| 920 | 1 | _ | |0 I:(DE-Juel1)IMD-3-20101013 |k IMD-3 |l Photovoltaik |x 0 |
| 980 | _ | _ | |a patent |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a I:(DE-Juel1)IMD-3-20101013 |
| 980 | _ | _ | |a UNRESTRICTED |
| Library | Collection | CLSMajor | CLSMinor | Language | Author |
|---|