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@INPROCEEDINGS{Zheng:1048100,
      author       = {Zheng, Hongkui and Pivak, Yevheniy and Rossum, Christian
                      Deen-van and Andersen, Mia and Pen, Merijn and Basak,
                      Shibabrata and Eichel, Rüdiger-A and Garza, Hugo Pérez},
      title        = {{M}ultimodal {I}n {S}itu {E}lectron {M}icroscopy {P}latform
                      for {C}orrelative {E}lectro-{T}hermal {C}haracterization and
                      {F}ailure {A}nalysis},
      reportid     = {FZJ-2025-04492},
      pages        = {567-568},
      year         = {2025},
      comment      = {: [Proceedings] - , 2025. - ISBN -
                      doi:10.31399/asm.cp.istfa2025p0567},
      booktitle     = {: [Proceedings] - , 2025. - ISBN -
                       doi:10.31399/asm.cp.istfa2025p0567},
      abstract     = {We introduce a correlative in situ platform for
                      electro-thermal studies in both TEM and SEM using the same
                      MEMS-based Nano-Chip. Equipped with up to eight electrodes,
                      the chip enables precise electrical biasing and localized
                      heating of as prepared samples under real operating
                      conditions. A dedicated SEM holder ensures seamless,
                      damage-free transfer from TEM, combining atomic-scale
                      imaging with SEM analytics (EDX, EBSD, TKD) and optional AFM
                      integration. Designed for semiconductor materials, the
                      system captures real-time structural evolution during
                      heating and biasing, delivering artifact-free, multimodal
                      insights for semiconductor reliability, device optimization,
                      and advanced materials development.},
      month         = {Nov},
      date          = {2025-11-16},
      organization  = {ISTFA 2025, Pasadena, California
                       (USA), 16 Nov 2025 - 20 Nov 2025},
      cin          = {IET-1},
      cid          = {I:(DE-Juel1)IET-1-20110218},
      pnm          = {1231 - Electrochemistry for Hydrogen (POF4-123)},
      pid          = {G:(DE-HGF)POF4-1231},
      typ          = {PUB:(DE-HGF)8 / PUB:(DE-HGF)7},
      doi          = {10.31399/asm.cp.istfa2025p0567},
      url          = {https://juser.fz-juelich.de/record/1048100},
}