%0 Journal Article
%A Slama, Martin
%A Basak, Shibabrata
%A Giannuzzi, Lucille
%A Ahrens, Lara
%A Eichel, Rüdiger-A
%T The Impact of Applied Ion Energy on Low-Damage (S)TEM Sample Preparation Caused by Various Ion Species in FIB-SEM
%J Microscopy and microanalysis
%V 31
%N Supplement_1
%@ 1079-8501
%C Oxford
%I Oxford University Press
%M FZJ-2025-04494
%P ozaf048.007
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1093/mam/ozaf048.007
%U https://juser.fz-juelich.de/record/1048102