TY  - JOUR
AU  - Slama, Martin
AU  - Basak, Shibabrata
AU  - Giannuzzi, Lucille
AU  - Ahrens, Lara
AU  - Eichel, Rüdiger-A
TI  - The Impact of Applied Ion Energy on Low-Damage (S)TEM Sample Preparation Caused by Various Ion Species in FIB-SEM
JO  - Microscopy and microanalysis
VL  - 31
IS  - Supplement_1
SN  - 1079-8501
CY  - Oxford
PB  - Oxford University Press
M1  - FZJ-2025-04494
SP  - ozaf048.007
PY  - 2025
LB  - PUB:(DE-HGF)16
DO  - DOI:10.1093/mam/ozaf048.007
UR  - https://juser.fz-juelich.de/record/1048102
ER  -