%0 Journal Article
%A Theile-Rasche, Chantal
%A Wang, Fuzeng
%A Prüßner, Tim
%A Huck, Marten
%A Steinrück, Hans-Georg
%A de los Arcos, Teresa
%A Grundmeier, Guido
%T Evaluation of anti-adhesive and corrosion protection properties of TiAlSiN-magnetron-sputtered films for applications in polymer processing
%J Thin solid films
%V 820
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M FZJ-2025-04761
%P 140676 -
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1016/j.tsf.2025.140676
%U https://juser.fz-juelich.de/record/1048621