%0 Conference Paper
%A Jung, Carl
%T Functional layers -  Chemical vapour deposition
%I RWTH Aachen
%M FZJ-2025-05663
%D 2025
%B EC Days
%C 1 Sep 2025 - 2 Sep 2025, Eindhoven (Netherlands)
Y2 1 Sep 2025 - 2 Sep 2025
M2 Eindhoven, Netherlands
%F PUB:(DE-HGF)31
%9 Talk (non-conference)
%U https://juser.fz-juelich.de/record/1049903