TY  - CONF
AU  - Jung, Carl
TI  - Functional layers -  Chemical vapour deposition
PB  - RWTH Aachen
M1  - FZJ-2025-05663
PY  - 2025
T2  - EC Days
CY  - 1 Sep 2025 - 2 Sep 2025, Eindhoven (Netherlands)
Y2  - 1 Sep 2025 - 2 Sep 2025
M2  - Eindhoven, Netherlands
LB  - PUB:(DE-HGF)31
UR  - https://juser.fz-juelich.de/record/1049903
ER  -