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@ARTICLE{Zhao:1050093,
author = {Zhao, Qing-Tai and Han, Yi and Han, Hung-Chi and Schreiber,
Lars R. and Lee, Tsung-En and Chiang, Hung-Li and Radu,
Iuliana and Enz, Christian and Grützmacher, Detlev and
Stampfer, Christoph and Takagi, Shinichi and Knoch, Joachim},
title = {{U}ltra-low-power cryogenic complementary metal oxide
semiconductor technology},
journal = {Nature reviews / Electrical engineering},
volume = {2},
number = {4},
issn = {2948-1201},
address = {[London]},
publisher = {Nature Publishing Group UK},
reportid = {FZJ-2025-05801},
pages = {277 - 290},
year = {2025},
abstract = {Universal cryogenic computing, encompassing von Neumann,
neuromorphic and quantum computing, paves the way for future
big-data processing with high energy efficiency.
Complementary metal oxide semiconductor (CMOS) technology
operating at cryogenic temperatures with ultra-low power
consumption is a key component of this advancement. However,
classical CMOS technology, designed for room temperature
applications, suffers from band-tail effects at cryogenic
levels, leading to an increased subthreshold swing and
decreased mobility values. In addition, threshold voltages
are enlarged. Thus, classical CMOS technology fails to meet
the low power requirements when cooled close to zero Kelvin.
In this Perspective, we show that steep slope cryogenic
devices can be realized by screening the band tails with the
use of high-k dielectrics and wrap-gate architectures and/or
reducing them through the optimization of the surfaces and
interfaces within the transistors. Cryogenic device
functionality also strongly benefits from appropriate
source/drain engineering employing dopant segregation from
silicides. Furthermore, the threshold voltage control can be
realized with back-gating, work-function engineering and
dipole formation. As a major implication, future research
and development towards cryogenic CMOS technology requires a
combination of these approaches to enable universal
cryogenic computing at the necessary ultra-low power
levels.},
cin = {PGI-11 / PGI-9},
cid = {I:(DE-Juel1)PGI-11-20170113 / I:(DE-Juel1)PGI-9-20110106},
pnm = {5221 - Advanced Solid-State Qubits and Qubit Systems
(POF4-522)},
pid = {G:(DE-HGF)POF4-5221},
typ = {PUB:(DE-HGF)16},
doi = {10.1038/s44287-025-00157-7},
url = {https://juser.fz-juelich.de/record/1050093},
}