%0 Journal Article
%A Tröger, Jan
%A Kersting, Reinhard
%A Hagenhoff, Birgit
%A Bougeard, Dominique
%A Abrosimov, Nikolay V.
%A Klos, Jan
%A Schreiber, Lars
%A Bracht, Hartmut
%T Optimizing time-of-flight secondary ion mass spectrometry depth profiles of semiconductor heterostructures
%J Journal of applied physics
%V 137
%N 2
%@ 0021-8979
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2025-05802
%P 025301
%D 2025
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1063/5.0232252
%U https://juser.fz-juelich.de/record/1050094